lithography simulation tools, immersion lithography, Spc, photolithography process development, low k1 imaging, material characterization, Doe, polarized illumination, Optics, basic statistical data analysis

Vapor etch, Memory process flow, Particle counters, Fab metrology tools, Electrical evaluation methods, Selective chemical etching, Spc, Thickness measurement, Wet strip, Dry strip, Data analysis systems, Vertical NAND, Doe