Key Responsibilities
1. Equipment Ownership & Uptime
- Serve as primary owner for assigned tools, especially, AMAT SuperE, AMAT DPS systems.
- Maintain and continuously improve OEE, MTBF, and MTTR targets.
- Develop and maintain equipment health monitoring and baseline control (SPC, FDC, fault codes, alarms).
- Drive daily tool performance reviews, documenting issues, actions, and recovery plans.
2. Maintenance & Troubleshooting
- Plan, execute, and optimize preventive maintenance (PM) activities according to OEM recommendations and fab strategies.
- Perform complex troubleshooting on electrical, mechanical, vacuum, RF, gas delivery, and software subsystems.
- Lead root cause analysis (RCA) for chronic and highimpact issues using structured methods (8D, Fishbone, 5Why, etc.).
- Coordinate and supervise vendor field service engineers (FSEs) and contractors during major interventions, upgrades, and rebuilds.
3. Process / Equipment Interaction
- Work closely with process engineering to ensure equipment performance supports CD, profile, uniformity, selectivity, and defectivity requirements.
- Analyze tool logs, SPC charts, metrology data, and wafer maps to correlate equipment conditions with yield and parametric performance.
- Support process qualifications, chamber swaps, hardware changes, and recipe releases.
- Ensure correct implementation and maintenance of chamber matching between AMAT and TEL tools.
4. Continuous Improvement & Cost Reduction
- Identify and implement improvement projects to increase uptime, extend parts lifetime, and reduce operating cost.
- Optimize consumables usage and spare parts strategy (buffer stock, repair vs. replace, refurbishment plans).
- Participate in or lead CIP / Lean / Six Sigma projects for productivity and quality enhancement.
- Support capacity upgrades (chamber additions, throughput improvement, software enhancements).
5. Documentation, Procedure & Training
- Create and maintain standard operating procedures (SOPs), maintenance procedures, and troubleshooting guides for AMAT SuperE, AMAT DPS.
- Document all events, alarms, interventions, and changes in the equipment history system (EHS/CMMS).
- Provide technical training and coaching to equipment technicians, junior engineers, and shift personnel.
- Ensure compliance with change management process for hardware, software, and recipe modifications.
6. Safety & Compliance
- Ensure all activities follow EHS regulations, company safety rules, and cleanroom protocols.
- Conduct and support risk assessments, LOTO procedures, and safety audits for gas, chemical, RF, and highvoltage systems.
- Support compliance with ISO/Automotive/Quality Management Systems as applicable.
Job Requirement:
- Minimum Bachelor Degree in Electronic, Electrical & Engineering or equivalent.
- 6-8 years experience in the role as equipment engineer in performing root cause analysis and troubleshooting complex equipment issues in a semiconductor wafer fab.
- More than 5 years experience working on Applied Material Dry Etcher as an equipment engineer, must have experience working on Centura Super-e Oxide Etch.
- Must have equipment experience working on DPS Poly Etch.
- Good leadership skills to drive improvement projects
- Able to mentor junior engineers and provide technical guidance.
- Able to collaborate across cross-functional teams to optimize equipment performance and reliability.
- Ensure compliance with safety and industry standards.
