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Research Engineer / Senior Research Engineer ? BEOL Furnaces, (APM), IME

3-5 Years
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Job Description

We are looking for a motivated Research & Technical Support Engineer/Scientist to develop, maintain, and support BEOL furnace processes including BEOL metal anneal, barrier/liner engineering, dielectric curing, hydrogen anneals, and stressrelief treatments. This role involves both fundamental materials science and handson tool/process ownership in a cleanroom research environment. You will collaborate with R&D teams working on advanced interconnect technologies, photonic integration, 3D integration, and novel dielectric/metallization schemes.

Job Responsibilities:

BEOL Furnace Process Development

  • Develop and optimize BEOL thermal processes including Metal anneal, Barrier/liner stabilization, Dielectric curing, Passivation and Stressrelief anneals
  • Perform tool qualification, recipe loading, chamber matching, SPC set up and contamination monitoring.
  • Troubleshoot process excursions and ensure stable operations with high repeatability.
  • Correlates anneal conditions with film quality, stress, adhesion, and reliability metrics.

CrossFunctional Collaboration

  • Work closely with teams in Photonic IC, Wide-Bandgap Devices, Packaging and reliability for process integration.
  • Provide guidance for internal projects on thermal budgets, thermalstress implications, and BEOL process compatibility for novel materials and device architectures.

Job Requirements:

  • Degree (Bachelor, or Master based on job scope) or above in Electrical Engineering, Materials Science, Mechanical Engineering, Chemical Engineering, Chemistry, Physics or related fields.
  • 3 years of working experience in Semiconductor Fabrication is advantageous.
  • Handson experience with furnace processing, anneals, or BEOLrelated thermal steps is highly wanted.
  • Knowledge of metallization physics, anneal passivation, interconnect reliability and dielectric curing.
  • Understanding of thermal budget constraints and stressmanagement in BEOL stacks.
  • Hands-on experience in Design of Experiments (DOE), root cause analysis, and problem-solving methods is desired.
  • Experience in Photonic IC, SiC devices, 2.5D/3D packaging and/or Wafer Bonding would be a plus.
  • Proficiency with materials characterization tools, such as ellipsometry, XRD, XPS, TEM, SEM, stress measurement

More Info

About Company

The Agency for Science, Technology and Research (A*STAR) is a statutory board under the Ministry of Trade and Industry of Singapore.The agency supports R&D that is aligned to areas of competitive advantage and national needs for Singapore. These span the four technology domains of Manufacturing, Trade and Connectivity, Human Health and Potential, Urban Solutions and Sustainability, and Smart Nation and Digital Economy set out under the nation's five-year R&D plan (RIE2025).

Job ID: 144883567