Lithography Process Engineer

Job title: Lithography Process Engineer

1. Process Development and Optimization

• Operate, and optimize photolithography equipment, including Canon i-Line Stepper / Canon DUV stepper / Canon Scanner systems.
• Hands-on DNS track experience to support lithography process setup, development, optimization, and tool performance improvement activities.
• Define, develop, and tune process recipes, including focus, exposure dose, alignment, overlay, and other critical lithography parameters.
• Support BCD technology development through process characterization, window expansion, and optimization activities.
• Conduct process experiments, collect and analyze data, and implement improvements to enhance process robustness and performance.
• Collaborate with R&D, manufacturing, and equipment teams to introduce and qualify new processes or process changes.

2. Process Monitoring and Control

• Monitor lithography process performance to ensure consistent output, high yield, and stable operation.
• Use DNS track knowledge to support process monitoring, track troubleshooting, and day-to-day manufacturing stability.
• Perform routine process qualifications, tool matching, SPC monitoring, and defect analysis.
• Troubleshoot process excursions, identify root causes, and implement effective corrective and preventive actions.
• Work closely with equipment engineers to ensure tool readiness, uptime, and process stability.

3. Data Analysis and Problem Solving

• Analyze process, metrology, and defect data to identify trends, risks, and improvement opportunities.
• Lead or support root-cause analysis for process-related issues and yield loss.
• Use data-driven methods to improve process stability, throughput, and overall manufacturing performance.
• Provide technical recommendations based on experimental results and production data.

4. Documentation and Reporting

• Maintain accurate records of process parameters, experiments, qualifications, and results.
• Prepare technical reports, summaries, and presentations for engineering reviews and management updates.
• Update process specifications, operating procedures, and control plans as required.
• Ensure proper documentation of process changes and lessons learned.

5. Cross-Functional Collaboration

• Work closely with cross-functional teams including R&D, production, quality, equipment, and integration.
• Support shift engineers and technicians as needed to resolve process or tool-related issues.
• Participate in technical discussions, problem-solving meetings, and improvement initiatives.
• Contribute to smooth process integration and technology transfer activities.

6. Continuous Improvement

• Identify and lead continuous improvement initiatives to improve yield, efficiency, quality, and cycle time.
• Explore opportunities for process automation and smarter process control.
• Support lean manufacturing and operational excellence initiatives in the lithography area.
• Drive standardization and best practice sharing across tools and teams.

Required Qualifications

• Bachelor's degree or higher in Materials Science, Chemical Engineering, Electrical Engineering, Physics, Microelectronics, or a related field.
• Experience in Semiconductor Lithography Process Engineering.
• Knowledge of BCD process technology.
• Hands-on experience with Canon i-Line Stepper or CanonDUV stepper or Canon Scanner
• Understanding of lithography fundamentals, process windows, alignment, overlay, exposure control, and defect mechanisms.
• Experience in process monitoring, SPC, troubleshooting, and root-cause analysis.
• Ability to work independently and collaboratively in a fast-paced manufacturing environment.
• Experience supporting tool qualification, process transfer, or technology ramp-up.
• Exposure to inline process integration and yield improvement projects.
• Good communication, documentation, and presentation skills.
• Basic DNS track hands-on experience