Spc, Process-chemistry relationships, Thin film deposition, CVD Diffusion, AFM, Film characterization, Plasma vacuum systems, Doe, sims, TEM, Sem, Xps

vertical NAND, data analysis systems, Doe, Spc, memory process flow

overlay , defect mechanisms, process windows, exposure control, lithography fundamentals, SPC troubleshooting, Alignment, DNS SVG track, root-cause analysis, Canon Stepper EVG620, process monitoring