Data Analysis, CMP fundamentals, slurry chemistry, CMP process types, CMP process development, pad–slurry–wafer interactions, qualification methodologies

immersion lithography, Spc, material characterization, semiconductor process flows, polarized illumination, Optics, cutting edge photolithography equipment, photolithography process equipment roadmaps, Memory Architecture, lithography simulation tools, low k1 imaging, Doe, metrology tools, basic statistical data analysis