statistical data analysis , lithography simulation tools, immersion lithography, Spc, photolithography process development, low k1 imaging, material characterization, Doe, polarized illumination, Optics

memory process flow, Spc, Doe, data analysis systems, vertical NAND

QRQC, Fmea, Spc, wet etching, WET Cleaning Process, WET Bench, 8D